Design and experimental validation of a restoring force enhanced RF MEMS capacitive switch with stiction-recovery electrodes

被引：0

作者：

Muhua Li

Jiahao Zhao

Zheng You

Guanghong Zhao

机构：

[1] Tsinghua University,Department of Precision Instrument

[2] State Key Laboratory of Precision Measurement Technology and Instruments,undefined

[3] Collaborative Innovation Center for Micro/Nano Fabrication,undefined

[4] Device and System,undefined

[5] Tsinghua-Berkeley Shenzhen Institute,undefined

[6] University Town of Shenzhen,undefined

[7] Beijing Research Institute of Telemetry,undefined

来源：

Microsystem Technologies | 2017年 / 23卷

关键词：

Insertion Loss; Actuation Voltage; Automate Test Equipment; Switch Structure; Torsional Beam;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

This paper presents an approach for restoring force enhancement to radio frequency (RF) micro-electro-mechanical systems (MEMS) switch with stiction-recovery actuation mechanism. It is based on additional anti-stiction electrodes which are inserted to the coplanar waveguide (CPW) between the signal line and ground planes of a RF MEMS switch. If the movable membrane sticks to the substrate, electrostatic force, as extra restoring force, generated by the bias voltage between the anti-stiction electrodes can promise restoring action. The designed device with the proposed approach is fabricated. The restoring force of the fabricated device had reached 75, 177 and 520 μN by the bias voltages of 0, 10 and 20 V, respectively.

引用

页码：3091 / 3096

页数：5

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