Numerical Investigation of Effect of Driving Voltage Pulse on Low Pressure 90%Ar–10%Cl2 Dielectric Barrier Discharge

An one-dimensional fluid model is used to study the physico-chemical properties of a 90%Ar–10%Cl2 plasma produced in dielectric barrier discharges under different driving voltages. The spatio-temporal characteristics of the discharge are obtained by applying a sinusoidal voltage with different amplitudes and frequencies from 350 to 1200 V and 10 to 19 kHz, respectively. As the voltage amplitude increases the plasma electronegativity and plasma radiations are increased and their radiations move toward the cathode vicinity. With decreasing frequency, the plasma radiations move toward the anode vicinity and the plasma electronegativity and its radiations are enhanced. At low voltage amplitudes, plasma most radiates VUV photons while UV radiations take place at higher voltage amplitudes.