共 53 条
[12]
Fabrication and qualification of roughness reference samples for industrial testing of surface roughness levels below 0.5 nm Sq
[J].
OPTICAL MANUFACTURING AND TESTING XI,
2015, 9575
[13]
Faehnle O, 2022, INT C OPT PHOT DES F
[14]
Faehnle O, 2018, P SPIE C PREC OPT MA
[17]
Fahnle O, 2012, imaging and applied optics technical papers
[18]
Fähnle O, 2021, PhotonicsViews, V18, P43, DOI [10.1002/phvs.202100051, 10.1002/phvs.202100051, DOI 10.1002/PHVS.202100051]