Low-energy ion scattering by monatomic films

The angular and energy distributions of Cs+ and Xe+ ions scattered by monatomic crystalline films have been calculated via the molecular dynamics method in the scope of the multiparticle interaction mechanism. The calculated dependences of scattered heavy ions with a low initial energy E0 = 40 eV on the atomic mass, crystal lattice type, interatomic distance, and binding energy of the film atoms are discussed and compared with the experiment. The presented data can be used to predict the physical properties of a surface covered with a monatomic layer of foreign atoms during experimental surface studies based on the backscattering of ions with low initial energies.