Effect of a displaced atom on a bulk surface topography induced by ion beam irradiation

The formation of a ripple topography on the surface of an amorphous solid at a small (subcritical) incidence angle of ions was studied by the statistical tests method. It was found that a pattern is formed if the sputtering of atoms in the uppermost layer of the target is taken into account along with the processes occurring in the bulk. In particular, the movement of the atoms displaced during the development of a cascade of impacts must be considered for the formation of a ripple topography with crests and valleys oriented along the beam projection onto the target surface.