共 29 条
[1]
Bao M(2007)Squeeze film air damping in MEMS Sens Actuators A 137 3-27
[2]
Yang H(2003)Modified Reynolds’ equation and analytical analysis of squeeze-film air damping of perforated structures J Micromech Microeng 13 795-800
[3]
Bao M(2010)Viscous damping and spring force in periodic perforated planar microstructures when the Reynold’s equation cannot be applied J Acoust Soc Am 127 1288-1299
[4]
Yang H(2010)An analytical formula and FEM simulations for the viscous damping of a periodic perforated MEMS microstructure outside the lubrication approximation Microfluid Nanofluid 9 865-879
[5]
Sun Y(2005)Fluid effects in vibrating micromachined structures J Microelectromech Syst 14 770-781
[6]
French PJ(2005)Analytical solutions for the stiffness and damping coefficients of squeeze films in MEMS devices with perforated back plates J Micromech Microeng 15 2083-2092
[7]
Homentcovschi D(2008)A comparative study of analytical squeeze film damping models in rigid rectangular perforated MEMS structures with experimental results Microfluid Nanofluid 4 205-218
[8]
Miles RN(1967–1968)On acoustical resistance due to viscous losses in the air gap of electrostatic transducers Acustica 19 295-297
[9]
Homentcovschi D(2008)Numerical and experimental comparison of MEMS suspended plates dynamic behaviour under squeeze film damping effect Analog Integr Circ Sig Process 57 213-224
[10]
Murray BT(2006)Analytic damping model for an MEM perforation cell Microfluid Nanofluid 2 249-260