Nonlinear nonlocal pull-in instability of boron nitride nanoswitches

被引:0
作者
A. Ghorbanpour Arani
M. Ghaffari
A. Jalilvand
R. Kolahchi
机构
[1] University of Kashan,Faculty of Mechanical Engineering
[2] University of Kashan,Institute of Nanoscience and Nanotechnology
来源
Acta Mechanica | 2013年 / 224卷
关键词
Casimir Force; Nonlocal Parameter; Nonlocal Elasticity; Differential Quadrature Method; Applied Voltage Versus;
D O I
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中图分类号
学科分类号
摘要
In the present study, nonlinear pull-in instability of boron nitride nanoswitches (BNNSs) subjected to electrostatic and van der Waals (vdW) forces is investigated. Based on Euler–Bernoulli beam theory, von Kármán geometric nonlinearity, nonlocal piezoelasticity theory and the principle of virtual work, the governing equations are obtained. The differential quadrature method is employed to discretize the nonlinear governing equations, which are then solved by a direct iterative method to obtain the nonlinear pull-in and pull-out voltages for cantilever and fixed–fixed boundary conditions. A detailed parametric study is conducted to elucidate the influences of nonlocal parameter, vdW force, fringing field, beam length and gap distance on the behavior of the pull-in instability voltage. Numerical results indicate that the magnitude of the pull-in voltage increases with increase in the gap distance. Furthermore, as the effective gap distance increases, the pull-out voltage tends toward the electrostatically pull-out voltage.
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页码:3005 / 3019
页数:14
相关论文
共 49 条
[1]  
Osterberg P.M.(1997)M-TEST: a test chip for MEMS material property measurement using electrostatically actuated test structures J. Microelectromech. Syst. 6 107-118
[2]  
Senturia S.D.(2002)Modeling the pull-in parameters of electrostatic actuators with a novel lumped two degrees of freedom pull-in model Sens. Act. A 97 569-578
[3]  
Bochobza-Degani O.(2001)Theoretical Study of the Sticking of a Membrane Strip in MEMS under the Casimir effect J. Micromech. Microeng. 11 202-208
[4]  
Nemirovsky Y.(1937)The londen-van der Waals attraction between spherical particles J. Physica 4 1058-1072
[5]  
Ding J.N.(2005)The Casimir force background, experiments, and applications Rep. Prog. Phys. 68 201-236
[6]  
Wen S.Z.(2002)Calculation of pull-in voltages for carbon nanotube-based nanoelectromechanical switches Nanotech. 13 120-131
[7]  
Meng Y.G.(2002)Analytical calculations for nanoscale electromechanical systems Electrochem. Soc. Proc. 6 90-97
[8]  
Hamaker H.C.(2002)A physical model to predict stiction in MEMS J. Micromech. Microeng. 12 702-713
[9]  
Lamoreaux S.K.(2003)Dynamic behavior of nanoscale electrostatic actuators Chin. Phys. Lett. 20 2070-2073
[10]  
Dequesnes M.(2006)Influence of Van der Waals force on the pull-in parameters of cantilever type nanoscale electrostatic actuators J. Microsyst. Technol. 12 1153-1161