Processing and Thermoelectric Performance Characterization of Thin-Film Devices Consisting of Electrodeposited Bismuth Telluride and Antimony Telluride Thin-Film Legs

被引：0
|
作者：
Min-Young Kim
Tae-Sung Oh
机构：
[1] Hongik University,Department of Materials Science and Engineering
来源：
Journal of Electronic Materials | 2011年 / 40卷
关键词：
Thermopile; thin film; Seebeck effect; electrodeposition; bismuth telluride; antimony telluride;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Thermopile thin-film devices were fabricated by successive electrodeposition of p-type Sb-Te and n-type Bi-Te films. The thermopile processed with 1-μm-thick SiO2 as an insulating layer on the thin-film legs exhibited sensitivity of 57.5 mV/K, much larger than the 7.3 mV/K measured for a thermopile with an insulating layer of 6-μm-thick photoresist. Sensitivity of 30.4 mV/K was obtained for a thermopile with a 1-μm-thick SiNx insulating layer.
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页码：759 / 764
页数：5
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