Mechanism of Diffusion of Carbon and Silicon Monooxides in a Cubic Silicon Carbide Crystal

被引:0
作者
S. A. Kukushkin
A. V. Osipov
机构
[1] Institute of Problems of Mechanical Engineering,
[2] Russian Academy of Sciences,undefined
[3] St. Petersburg National Research University of Information Technologies,undefined
[4] Mechanics and Optics,undefined
来源
Physics of the Solid State | 2019年 / 61卷
关键词
silicon carbide; diffusion; ab initio simulation; epitaxy;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:2338 / 2341
页数:3
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