Study of phase transformations in silicon by scanning tunneling spectroscopy and nanoindentation

被引:0
作者
O. G. Lysenko
S. N. Dub
V. I. Grushko
E. I. Mitskevich
G. N. Tolmacheva
机构
[1] National Academy of Sciences of Ukraine,Bakul Institute for Superhard Materials
[2] Kharkiv Institute of Physics and Technology,National Scientific Center
来源
Journal of Superhard Materials | 2013年 / 35卷
关键词
silicon; scanning tunneling microscopy; nanoscratching; nanoindentation;
D O I
暂无
中图分类号
学科分类号
摘要
The results have been reported of the experiments on nanoscratching and nanoindentation of the surface of silicon using scanning tunneling microscope equipped with diamond semiconducting probe. Physical phenomena in silicon occurring at various contact pressures have been discussed.
引用
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页码:350 / 355
页数:5
相关论文
共 72 条
[1]  
Gridneva IV(1972)Phase Transition in Diamond-Structured Crystals During Hardness Measurements Phys. Status Solidi (a) 14 177-182
[2]  
Mil’man YuV(1990)The Mechanical Behavior of Silicon during Small-Scale Indentation J. Elec. Mater. 19 881-887
[3]  
Trefilov VI(1992)The Anomalous Behavior of Silicon during Nanoindentation Mater. Res. Soc. Symp. Proc. 239 301-312
[4]  
Pharr GM(1995)Influence of Spherical Indenter Radius on the Indentation-Induced Transformation Behavior of Silicon J. Mater. Sci. 30 2455-2462
[5]  
Oliver WC(2007)An in situ Electrical Measurement Technique via a Conducting Diamond Tip for Nanoindentation in Silicon J. Mater. Res. 22 578-586
[6]  
Clarke DR(2002)Transmission Electron Microscopy of Amorphization and Phase Transformation beneath Indent in Si Phil. Mag. A 82 1971-1981
[7]  
Pharr GM(2001)Mechanical Deformation in Silicon by Micro-Indentation J. Mater. Res. 16 1550-1507
[8]  
Weppelmann ER(2000)Cyclic Nanoindentation and Raman Micro-Spectroscopy Study of Phase Transformations in Semiconductors J. Mater. Res. 15 871-879
[9]  
Field JS(2000)Effect of Phase Transformations on the Shape of Unloading Curve in the Nanoindentation of Silicon Appl. Phys. Lett. 76 2214-2216
[10]  
Swain MV(2011)Scanning Probe Microscopy with Diamond Tip in Tribo-Nanolithography Proc. Mater. Res. Soc. Symp. 1318 179-183