Effect of Low-Energy Ion Bombardment on the Texture and Microstructure of Platinum Films

被引：0
作者：
R. V. Selyukov
V. V. Naumov
M. O. Izyumov
S. V. Vasilev
L. A. Mazaletskiy
机构：
[1] Valiev Institute of Physics and Technology,
[2] Yaroslavl Branch,undefined
[3] Russian Academy of Sciences,undefined
[4] Demidov State University,undefined
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2023年 / 17卷
关键词：
thin films; platinum; magnetron sputtering; ion bombardment; inductively coupled plasma; coherently diffracting domain; crystal texture; crystal phase; X-ray diffraction; rocking curve;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：180 / 186
页数：6
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