X-Ray Reflectivity Study of Formation of Multilayer Porous Anodic Oxides of Silicon

被引：0

作者：

Vitali Parkhutik

Y. Chu

H. You

Z. Nagy

P.A. Montano

机构：

[1] Technical University of Valencia,Argonne National Laboratory

[2] MSD,undefined

来源：

Journal of Porous Materials | 2000年 / 7卷

关键词：

X-ray reflectivity; anodic oxide; oscillations;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Present work reports a study of the morphology of thin (50–600 Å) porous oxides of silicon grown in a special regime of the oscillating anodic potential. X-ray reflectivity (in-situ and ex-situ) was applied to analyze the morphology of oxides. It has been established that there is a direct correlation between a number of oscillations of potential during the oxide growth and the structure of oxide: it has a multi-layer structure with the number of layers corresponding to the number of oscillations.

引用

页码：27 / 31

页数：4

共 17 条

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[7] Parratt F.(undefined)undefined undefined undefined undefined-undefined
[8] You H.(undefined)undefined undefined undefined undefined-undefined
[9] Melendres C.A.(undefined)undefined undefined undefined undefined-undefined
[10] Nagy Z.(undefined)undefined undefined undefined undefined-undefined

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