3D simulation of electrodynamics of a microwave low pressure discharge

被引：0
|
作者：
Yu. A. Lebedev
A. V. Tatarinov
I. L. Epshtein
机构：
[1] Russian Academy of Sciences (TIPS RAS),Topchiev Institute of Petrochemical Synthesis
来源：
High Temperature | 2011年 / 49卷
关键词：
Microwave Field; Discharge Chamber; Observation Window; Electron Energy Distribution Function; Center Electrode;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The structure of microwave fields in a discharge chamber used for obtaining electrode microwave discharge is investigated. It is shown that 3D-simulation allows quantitatively determining the optimumal structural parts of the discharge chamber for discharge generation. The represented results of self-consistent simulation of the discharge in nitrogen and hydrogen at a pressure of 1 torr are qualitatively consistent with experimental results.
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页码：775 / 787
页数：12
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