X-ray diffractometry diagnosis of laser diffusion of aluminum into silicon

High-resolution X-ray diffractometry was used to study alterations of the structure of single-crystal silicon taking place in the process of nonequilibrium solid-state diffusion of aluminum atoms occurring under heating of the near-surface layer by radiation of a CO2 laser with pulse durations 1, 2, and 3 s. Crystal lattice deformation profiles, diffusion lengths, and densities of dislocation loops have been determined.