Machine Allocation in Semiconductor Wafer Fabrication Systems: A Simulation-Based Approach

被引：0

作者：

Yanfeng Wu

Sihua Chen

机构：

[1] Jiangxi University of Finance and Economics,School of Finance

[2] Jiangxi University of Finance and Economics,School of Information Management

来源：

Journal of Systems Science and Systems Engineering | 2023年 / 32卷

关键词：

Semiconductor wafer fabrication system; machine allocation; discrete-event simulation; marginal machine allocation;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The problem of maximizing the throughput of Semiconductor Wafer Fabrication Systems is addressed. We model the fabrication systems as a Stochastic Timed Automata and design a discrete-event simulation scheme. The simulation scheme is explicit, fast and achieves high fidelity which captures the feature of reentrant process flow and is flexible to accommodate diversified wafer lot scheduling policies. A series of Marginal Machine Allocation Algorithms are proposed to sequentially allocate machines. Numerical experiments suggest the designed methods are efficient to find good allocation solutions.

引用

页码：372 / 390

页数：18

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