Study of postgrowth processing in the fabrication of quantum-cascade lasers

被引：0
作者：
V. V. Mamutin
N. D. Ilyinskaya
D. A. Bedarev
R. V. Levin
B. V. Pushnyi
机构：
[1] Russian Academy of Sciences,Ioffe Physical
来源：
Semiconductors | 2014年 / 48卷
关键词：
Ohmic Contact; Quantum Cascade Laser; Indium Phosphide; Metal Organic Vapor Phase Epitaxy; Laser Stripe;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The special postgrowth processing of structures for quantum-cascade lasers is studied. The processing includes regrowth with a high-resistivity material (indium phosphide) with a carrier concentration of n ≈ 5 × 1010 cm−3, photolithography with various wet chemical etchants, and the fabrication of special contacts providing enhanced heat removal. The use of modified postgrowth processing provides necessary parameters satisfying requirements for high-quality devices.
引用
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页码：1103 / 1108
页数：5
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