Mechanical and tribological characterization of a thermally actuated MEMS cantilever

被引：0
作者：
Marius Pustan
Véronique Rochus
Jean-Claude Golinval
机构：
[1] Technical University of Cluj-Napoca,LTAS
[2] IMEC,Liège
[3] University of Liège,undefined
来源：
Microsystem Technologies | 2012年 / 18卷
关键词：
Atomic Force Microscope; Adhesive Force; Atomic Force Microscope Measurement; Atomic Force Microscope Probe; Thermal Actuator;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The temperature effect on the mechanical and tribological behaviors of a microelectromechanical systems cantilever is experimentally investigated using an atomic force microscope. A nonlinear variation of the bending stiffness of microcantilevers as a function of temperature is determined. The variation of the adhesion force between the tip of atomic force microscope (AFM) probe (Si3N4) and the microcantilever fabricated in gold is monitored at different temperatures. Using the lateral mode operation of atomic force microscope, the influence of temperature on friction coefficient between the tip of AFM probe and microcantilever is presented. Finite element analysis is used to estimate the thermal field distribution in microcantilever and the axial expansion.
引用
收藏
页码：247 / 256
页数：9
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