Determination of the composition of multicomponent chalcogenide semiconductors by X-ray fluorescence analysis

The composition of Asx(GeySe1 − y)1 − x glassy alloys is quantitatively determined by measuring the X-ray fluorescence spectrum of a Ge0.2As0.4Se0.4 reference alloy. The atomic fractions of arsenic, germanium, and selenium are calculated from the X-ray fluorescence spectra and the xRFA = f(x) and yRFA = f(y) dependences are plotted. These dependences make it possible to determine the composition of the glasses with an accuracy of ±0.0005 for x and y. This procedure is effective for finding the concentration of the tin impurity in Pb1 − xSnxSe crystalline solid solutions. However, it is impossible to determine the content of tellurium in Tex(AsySe1 − y)1 − x glassy alloys because the alloy components have significantly different X-ray fluorescence characteristics.