Fabrication and electrical characterization of integrated nano-scale fluidic channels

We present the fabrication and characterization of nanoscale fluidic channels with embedded electrodes. Arrays of 2.25 μm long and 60 nm tall nanochannels with widths ranging from 60 to 500 nm were microfabricated in SiO2 with Au electrodes embedded inside and outside of the nanochannels. The built-in electrodes were able to probe nanochannel conductance via a redox reaction of \documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$ {\text{Fe}}({\text{CN}})_{6}^{3 - /4 - } $$\end{document}. Amperometric characterization showed that conductance of nanochannel arrays varied linearly both with the width and number of nanochannels and was in the 10–100 pS range. Further, we show that electrical current was largely diffusion based and could be predicted from channel geometry using standard diffusion equations. We also discuss the potential of such nanochannel arrays as electronic biomolecular sensors and show preliminary streptavidin detection results.