General features of interaction between copper and chlorine-containing gases

被引：0
作者：
A. V. Dunaev
D. V. Sitanov
D. B. Murin
机构：
[1] Ivanovo State University of Chemistry and Technology,
来源：
High Energy Chemistry | 2017年 / 51卷
关键词：
copper; Freon R-12; plasma etching; reactive particles; atomic force microscopy;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The interaction of copper with chlorine-containing gases has been studied. The resulting kinetic relationships are linear, indicating that the process occurs in a steady-state mode. It has been found that biases of −61 and −107 W provide energy of ions sufficient to maintain the effective rate of ion-stimulated desorption of the reaction products. The surface quality of the treated samples has been analyzed using atomic force microscopy.
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页码：224 / 228
页数：4
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