Microring resonator for glucose sensing applications

被引：21

作者：

Chen Y. ^{[1
,2
]}

Li Z. ^{[1
,2
]}

Yi H. ^{[2
]}

Zhou Z. ^{[2
,3
,4
]}

Yu J. ^{[1
]}

机构：

[1] Department of Electronic Science and Technology, Huazhong University of Science and Technology, Wuhan

[2] Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan

[3] State Key Laboratory on Advanced Optical Communication Systems and Networks, Peking University, Beijing

[4] School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA

来源：

Frontiers of Optoelectronics in China | 2009年 / 2卷 / 3期

基金：

中国国家自然科学基金;

关键词：

chemical sensor; glucose sensing; microring resonator; Q factor; refractive index unit (RIU);

D O I：

10.1007/s12200-009-0047-3

中图分类号：

学科分类号：

摘要：

Silicon nitride microring resonators were demonstrated as chemical sensors. The microring devices, with diameter of 100 μm, were fabricated using complementary metal oxide semiconductor (CMOS)-compatible technology, and a high Q factor of 15000 was realized with free spectrum range (FSR) of 2 nm. The structures were further packaged to perform as chemical sensors, and their functionality was proved using deionized water (DI water) and ethanol as detecting mediums. Lastly, the packaged chips were used to detect glucose solutions with various concentrations, and a detection capability of refractive index change of 10-3 refractive index unit (RIU) was obtained. © 2009 Higher Education Press and Springer-Verlag GmbH.

引用

页码：304 / 307

页数：3

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