Quasi-Static Pull-in: an Instability in Electrostatic Actuators

被引:0
作者
M. S. Al-Ghamdi
M. E. Khater
E. M. Abdel-Rahman
E. G. Nepomuceno
机构
[1] King Abdulaziz City for Science and Technology (KACST),National Center for Electronics and Photonics
[2] King Fahd University of Petroleum and Minerals (KFUPM),Mechanical Engineering
[3] University of Waterloo,Department of Systems Design Engineering
[4] Federal University of Sao Joao del-Rei,Department of Electrical Engineering
来源
Scientific Reports | / 10卷
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摘要
We identify a new instability in electrostatic actuators dubbed quasi-static pull-in. We report experimental evidence of the instability and study its characteristics in two types of micro actuators operating in ambient air. We found that the underlying mechanism is a fast-slow dynamic interaction between slowly-varying electrostatic excitation and fast resonator response that instigate large non-resonant oscillatory orbits and eventually disappears in a global Shilnikov bifurcation. Based on these findings, we formulate and present a new taxonomy of pull-in instabilities in electrostatic actuators.
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