Formation and Analysis of Multilayer Multielement Nanostructured Metal Films

被引：0
作者：
Yu. F. Ivanov
N. A. Prokopenko
V. V. Shugurov
O. S. Tolkachev
E. A. Petrikova
M. S. Petyukevich
O. V. Krysina
Yu. H. Akhmadeev
A. N. Shmakov
机构：
[1] Institute of High Current Electronics,
[2] Siberian Branch,undefined
[3] Russian Academy of Sciences,undefined
[4] Budker Institute of Nuclear Physics,undefined
[5] Siberian Branch,undefined
[6] Russian Academy of Sciences,undefined
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2023年 / 17卷
关键词：
multilayer nanocrystalline films; metal substrate; high-entropy alloy; plasma-assisted vacuum arc evaporation; cathode; synchrotron radiation; elemental and phase composition; transmission electron microscopy; structure; microhardness;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：1452 / 1457
页数：5
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