Effect of Boron Ion Implantation on the Structure, Phase Composition, and Mechanical Properties of Chromium-Fullerite-Chromium Films

被引:1
作者
Baran L.V. [1 ]
机构
[1] Belarusian State University, Minsk
关键词
atomic force microscopy; chromium-fullerite films; ion implantation; mechanical properties; phase composition; structure;
D O I
10.1134/S2075113318030061
中图分类号
学科分类号
摘要
The structure, phase composition, and mechanical properties of three-layer chromium-fulleritechromium films subjected to implantation with B+ ions (E = 80 keV, D = 5 × 1017 ion/cm2) are studied using the methods of atomic force microscopy, X-ray diffraction phase analysis, and nanoindentation. It is established that, as a result of ion implantation, the chromium and fullerite layers are intermixed and a solid-phase interaction occurs, owing to which a heterophase structure is formed with an increased nanohardness as compared with samples not subjected to implantation. © 2018, Pleiades Publishing, Ltd.
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页码:370 / 375
页数:5
相关论文
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