Effect of Boron Ion Implantation on the Structure, Phase Composition, and Mechanical Properties of Chromium-Fullerite-Chromium Films

被引：1
作者：
Baran L.V. [1 ]
机构：
[1] Belarusian State University, Minsk
来源：
Inorganic Materials: Applied Research | 2018年 / 9卷 / 3期
关键词：
atomic force microscopy; chromium-fullerite films; ion implantation; mechanical properties; phase composition; structure;
D O I：
10.1134/S2075113318030061
中图分类号：
学科分类号：
摘要：
The structure, phase composition, and mechanical properties of three-layer chromium-fulleritechromium films subjected to implantation with B+ ions (E = 80 keV, D = 5 × 1017 ion/cm2) are studied using the methods of atomic force microscopy, X-ray diffraction phase analysis, and nanoindentation. It is established that, as a result of ion implantation, the chromium and fullerite layers are intermixed and a solid-phase interaction occurs, owing to which a heterophase structure is formed with an increased nanohardness as compared with samples not subjected to implantation. © 2018, Pleiades Publishing, Ltd.
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页码：370 / 375
页数：5
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