Precipitate splitting in Pb0.91La0.09Zr0.65Ti0.35O3 films

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作者
Bahadir Tunaboylu
Ken Ring
Sadik C. Esener
Cengiz Ozkan
Ali Ata
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[1] University of California at San Diego,Department of Electrical and Computer Engineering and Materials Science Program
[2] Department of Mechanical Engineering,University of California Riverside
[3] Gebze Institute of Technology,Department of Materials Science
[4] Present address: Kulicke and Soffa Test Products,undefined
[5] Present address: Conexant Systems,undefined
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摘要
The transformation to perovskite phase of Pb0.91La0.09Zr0.65Ti0.35O3 (9/65/35) films on r-sapphire and resulting annealed microstructures were examined by transmission electron microscopy. A random equiaxed polycrystalline grain morphology (approximately 600 nm) was observed after rapid-thermal annealing or furnace annealing when the as-deposited (radio-frequency-magnetron sputtering) films were predominantly pyrochlore. However, an interesting paired-plate structure was revealed after furnace annealing when the as-deposited films were fully perovskite. The average size of such a split precipitate was 35 nm in width and 150 nm in length.
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页码:2763 / 2766
页数:3
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