Electron Excited L X-Ray Spectra of the Elements 14 ≤ Z ≤ 22

The L spectra of the elements 14 ≤ Z ≤ 22 were reinvestigated. Because of the limited energy resolution of the multilayer reflectors neither Ll and Lη nor Lα and Lβ1 could be resolved. Nevertheless, the line Lβ3,4 = L1M2,3 was observed for all elements Z ≥ 16, but not for 14Si and 15P. Exceptions to this are 18Ar and 22Ti. For 18Ar no suitable sample is available. In the case of 22Ti the Lβ3,4 line is overlapped by the O Kα line which has its origin in the oxide surface layer of the Ti standard. In all cases the Lβ3,4 line was observed near to the expected position which was determined by means of the known electron binding energies.