Exploring microstencils for sub-micron patterning using pulsed laser deposition

被引：0
|
作者：
F. Vroegindeweij
E.A. Speets
J.A.J. Steen
J. Brugger
D.H.A. Blank
机构：
[1] University of Twente and MESA+ Institute for Nanotechnology,Faculty of Science & Technology
[2] Ecole Polytechnique Fédérale de Lausanne (EPFL),Microsystems Laboratory
来源：
Applied Physics A | 2004年 / 79卷
关键词：
Oxide; Silicon; Gold; Nickel; Titanate;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The possibilities of sub-micron patterning by means of microstencils using pulsed laser deposition were investigated. Stencils with circular and elliptical patterns were used, with pore sizes ranging from 1 μm down to 500 nm. Strontium titanate (SrTiO3), silicon (Si) and self-assembled monolayers on gold were used as substrate materials, whereas nickel (Ni), nickel oxide (NiO) and gold (Au) have been deposited. The results show that the chosen deposition setup makes an easy and fast way for high-quality pattern creation.
引用
收藏
页码：743 / 745
页数：2
相关论文
共 50 条
  • [1] Exploring microstencils for sub-micron patterning using pulsed laser deposition
    Vroegindeweij, F
    Speets, EA
    Steen, JAJ
    Brugger, J
    Blank, DHA
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 79 (4-6): : 743 - 745
  • [2] Sub-micron patterning of aluminum films by laser ablation
    Doerr, DW
    Alexander, DR
    MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY V, 1999, 3874 : 62 - 67
  • [3] Direct femtosecond laser writing system for sub-micron and micron scale patterning
    Vanagas, E
    Tuzhilin, D
    Zinkou, M
    Sedunov, A
    Vasiliev, N
    Kudryashov, I
    Kononov, V
    Suruga, S
    FOURTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION, 2003, 5063 : 374 - 377
  • [4] Effects of phase explosion in pulsed laser deposition of nickel thin film and sub-micron droplets
    Siew, W. O.
    Yap, S. S.
    Yong, T. K.
    Nee, C. H.
    Tou, T. Y.
    APPLIED SURFACE SCIENCE, 2011, 257 (07) : 2775 - 2778
  • [5] Sub-micron surface patterning by laser irradiation through microlens arrays
    Lim, C. S.
    Hong, M. H.
    Lin, Y.
    Chen, G. X.
    Kumar, A. Senthil
    Rahman, M.
    Tan, L. S.
    Fuh, J. Yh.
    Lim, G. C.
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2007, 192 : 328 - 333
  • [6] Sub-micron scale patterning using femtosecond laser and self-assembled monolayers interaction
    Chang, W
    Choi, M
    Kim, J
    Cho, S
    Whang, K
    APPLIED SURFACE SCIENCE, 2005, 240 (1-4) : 296 - 304
  • [7] Sub-micron RDL patterning for Advanced Packaging
    Mori, Ken-Ichiro
    Shelton, Douglas
    Goto, Yoshio
    Hasegawa, Yasuo
    Miura, Seiya
    2019 IEEE 69TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2019, : 101 - 105
  • [8] Sub-micron scale patterning of fluorescent silver nanoclusters using low-power laser
    Kunwar, Puskal
    Hassinen, Jukka
    Bautista, Godofredo
    Ras, Robin H. A.
    Toivonen, Juha
    SCIENTIFIC REPORTS, 2016, 6
  • [9] Sub-micron scale patterning of fluorescent silver nanoclusters using low-power laser
    Puskal Kunwar
    Jukka Hassinen
    Godofredo Bautista
    Robin H. A. Ras
    Juha Toivonen
    Scientific Reports, 6
  • [10] SUB-MICRON WHISKERS BY VAPOR DEPOSITION
    MOELOCK, CR
    ACTA METALLURGICA, 1962, 10 (FEB): : 161 - &
12345