Variation of the Crystal Structure on Si(111) Surface Induced by Ion Bombardment and Subsequent Annealing

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作者
S. Zh. Nimatov
B. E. Umirzakov
F. Ya. Khudaikulov
D. S. Rumi
机构
[1] Karimov State Technical University,
[2] Scientific and Technical Enterprise Proton,undefined
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Technical Physics | 2019年 / 64卷
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页码:1527 / 1529
页数:2
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