High-quality ZnO/GaN/α-Al2O3 heteroepitaxial structures grown by CVD

被引:0
作者
B. M. Ataev
I. K. Kamilov
W. V. Lundin
V. V. Mamedov
A. K. Omaev
Sh. -M. O. Shakhshaev
机构
[1] Russian Academy of Sciences,Institute of Physics, Dagestan Scientific Center
[2] Russian Academy of Sciences,Ioffe Physicotechnical Institute
来源
Technical Physics Letters | 2001年 / 27卷
关键词
Oxide; Zinc; Diffraction Pattern; Surface Morphology; Oxide Layer;
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中图分类号
学科分类号
摘要
The first results on the preparation of (0001)ZnO/(0001)GaN/(0001) α-Al2O3 heteroepitaxial structures by CVD in a low-pressure flow-type reactor are reported. Study of the surface morphology and X-ray diffraction patterns showed high structural perfection of the zinc oxide layer, with a block misorientation in the basal plane not exceeding 21′. The photoluminescence spectra of samples exhibited dominating emission in the exciton region.
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页码:55 / 57
页数:2
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