The optic material removal rate improved by vibration assistance in continuous polishing

被引：0
作者：
Feihu Zhang
Yiren Wang
Defeng Liao
Qiao Xu
机构：
[1] School of Mechanical Engineering,Harbin Institute of Technology
[2] China Academy of Engineering Physics,Research Center of Laser Fusion
来源：
The International Journal of Advanced Manufacturing Technology | 2021年 / 117卷
关键词：
Vibration assisted; Continuous polishing; MRR; Optics;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
To solve the problem of fast convergence in large aperture plane optics continuous polishing, the concept of vibration-assisted polishing is proposed in this paper. The paper first builds a low-frequency short-range vibration processing platform based on large-size polishing tools. Then, the kinematics and polishing pressure of the optics without vibration and vibration are analyzed. Furthermore, the pressure distribution under the element is simulated based on the finite element method. Finally, the material removal rate (MRR) is calculated based on Preston equation, which proves that the removal rate of optics under vibration condition is higher. In this paper, the problem of optics removal efficiency in continuous polishing is solved and the material enhanced removal mechanism is revealed.
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页码：3075 / 3082
页数：7
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