Finite element analysis of resonant properties of silicon nanowires with consideration of surface effects

We developed a 3D finite element model taking into account the surface effects which is considered significant in nanostructures and used the model to study the resonant frequencies and Young’s modulus of silicon nanowires on both fixed/fixed and fixed/free boundary conditions with diameters between 50 and 200 nm. We found that Young’s modulus and resonant frequencies significantly decreased with decreasing diameter when the diameter was less than 100 nm for fixed/free boundary condition, while they slightly decreased for fixed/fixed boundary condition. When the diameter is larger than 200 nm, the surface stresses may be neglected.