Fabrication of microfluidic channel utilizing silicone rubber with vacuum casting

被引：0
|
作者：
S. C. H. Thian
J. Y. H. Fuh
Y. S. Wong
H. T. Loh
P. W. Gian
Y. Tang
机构：
[1] National University of Singapore,Department of Mechanical Engineering
来源：
Microsystem Technologies | 2008年 / 14卷
关键词：
PDMS; Silicone Rubber; Microfluidic Channel; Soft Lithography; White Light Interferometry;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Microfluidic patterns of 100 μm in width and 50 μm height were replicated from a master using vacuum casting with silicone rubber. These silicone copies are subjected to thorough analysis for dimensional accuracy against the master pattern. Analysis of experimental results shows repeatability of the silicone rubber molds. To test the limits of vacuum casting with silicone rubber, an attempt was undertaken to replicate 8 μm microchannel and submicron features. The results show that casting of microfluidic channel via vacuum casting has high repeatability.
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页码：1125 / 1135
页数：10
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