A test object with three certified linewidth dimensions for a scanning electron microscope

被引：0

作者：

M. A. Danilova

V. B. Mityukhlyaev

Yu. A. Novikov

Yu. V. Ozerin

A. V. Rakov

P. A. Todua

机构：

[1] Research Center for the Study of the Properties of Surfaces and Vacuum,Prokhorov Institute of General Physics

[2] Russian Academy of Sciences,undefined

[3] NIIME and Mikron Factory,undefined

来源：

Measurement Techniques | 2008年 / 51卷

关键词：

scanning electron microscope; test object; linewidth; linear dimensions of the relief structures;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

A test object for a scanning electron microscope, which has a trapezoidal profile of the relief with large angles of inclination of the side walls, is developed. The test object contains elements (protrusions) with three certified dimensions of the linewidth, situated in two mutually perpendicular directions.

引用

页码：998 / 1003

页数：5