On the Optical Properties and Structure of In2O3 Films Deposited onto Al2O3 (012) Substrates by dc-Magnetron Sputtering

被引：0
作者：
A. A. Tikhii
Yu. M. Nikolaenko
K. A. Svyrydova
I. V. Zhikharev
机构：
[1] Lugansk State Pedagogical University,
[2] Galkin Donetsk Institute for Physics and Engineering,undefined
[3] Donbas National Academy of Civil Engineering and Architecture,undefined
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2023年 / 17卷
关键词：
indium oxide; films; sapphire; ellipsometry; optical transmission; X-ray diffraction analysis; magnetron deposition; annealing; substrate temperature; deposition time; band gap; optical properties;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：562 / 567
页数：5
相关论文
共 114 条
[51]  
Seiler W.(undefined)undefined undefined undefined undefined-undefined
[52]  
Nistor M.(undefined)undefined undefined undefined undefined-undefined
[53]  
Hebert C.(undefined)undefined undefined undefined undefined-undefined
[54]  
Jarzebski M. Z.(undefined)undefined undefined undefined undefined-undefined
[55]  
Kim H.(undefined)undefined undefined undefined undefined-undefined
[56]  
Gilmore C. M.(undefined)undefined undefined undefined undefined-undefined
[57]  
Pique A.(undefined)undefined undefined undefined undefined-undefined
[58]  
Horwitz J. S.(undefined)undefined undefined undefined undefined-undefined
[59]  
Mattoussi H.(undefined)undefined undefined undefined undefined-undefined
[60]  
Murata H.(undefined)undefined undefined undefined undefined-undefined
12345678910