Real-time surface shape measurement by an active interferometer

被引：0
|
作者：
Ji-Yuan Liu
Ichirou Yamaguchi
Jun-ichi Kato
Toshinori Nakajima
机构：
[1] Saitama University,Graduate School of Science and Engineering
[2] The Institute of Physical and Chemical Research (RIKEN),Optical Engineering Laboratory
来源：
Optical Review | 1997年 / 4卷
关键词：
surface measurement; active interferometer; real-time fringe analysis; current modulation of laser diode; feedback control;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
We have succeeded in video rate analysis of fringes stabilized by an active interferometer placed outside optical benches. The interferometer uses the closed loop control of injection current of a laser diode to compensate for fringe movement that is detected by a spatial filtering detector. A video image of the locked fringes with tilt is supplied to the real-time fringe analyzer that delivers unwrapped phase distribution from the three phase shifted fringes generated by the electronic moiré method. For a concave mirror of 130 mm diameter placed on a wooden desk we observed the repeatability of λ/60 for P-V surface error of λ/5.
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页码：216 / 220
页数：4
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