Radiation hardness of porous silicon

被引:0
作者
V. V. Ushakov
V. A. Dravin
N. N. Mel’nik
V. A. Karavanskii
E. A. Konstantinova
V. Yu. Timoshenko
机构
[1] Russian Academy of Sciences,P. N. Lebedev Physics Institute
[2] Russian Academy of Sciences,Institute of General Physics
[3] M. V. Lomonosov Moscow State University,Physics Faculty
来源
Semiconductors | 1997年 / 31卷
关键词
Radiation; Silicon; Magnetic Material; Electromagnetism; Porous Silicon;
D O I
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中图分类号
学科分类号
摘要
The effect of irradiation by 300-keV Ar+ ions on the properties of electrochemically produced porous silicon is studied at doses of 5×1014–1×1016 cm−2. Raman scattering and photoluminescence data are used to show that the radiation hardness of porous silicon layers is substantially greater than that of single crystal silicon.
引用
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页码:966 / 969
页数:3
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