Modelling of convective processes during the Bridgman growth of poly-silicon

被引:0
作者
V. N. Popov
机构
[1] Khristianovich Institute of Theoretical and Applied Mechanics SB RAS,
来源
Thermophysics and Aeromechanics | 2009年 / 16卷
关键词
convection; poly-silicon; heat and mass transfer; simulation;
D O I
暂无
中图分类号
学科分类号
摘要
An original 3D model was used to numerically examine convective heat-and-mass transfer processes in the melt during the growth of polycrystalline silicon in vertical Bridgman configuration. The flow in the liquid was modelled using the Navier — Stokes equations in the Boussinesq approximation. The distribution of dissolved impurities was determined by solving the convective diffusion equation. The effects due to non-uniform heating of the lateral wall of the vessel and due to the shape of the crystallization front on the structure of melt flows and on the distribution of dissolved impurities in the liquid are examined.
引用
收藏
页码:469 / 477
页数:8
相关论文
共 14 条
  • [1] Fujiwara K.(2004)Grain growth behaviors of polycrystalline silicon during melt growth processes J. Crystal Growth 266 441-448
  • [2] Obinata Y.(2007)Numerical modeling of melt flows in vertical Bridgman configuration affected by rotating heat field J. Crystal Growth 303 253-257
  • [3] Ujihara T.(1965)Numerical calculation of time-dependent viscous incompressible flow of fluid with free surface Phys. Fluids 8 2182-2189
  • [4] Kokh K.A.(1972)A calculation procedure for heat, mass and momentum transfer in three-dimensional parabolic flows Int. J. Heat Mass Trans. 15 1787-1806
  • [5] Popov V.N.(1967)A numerical method for solving incompressible viscous flow problems J. Comput. Phys. 2 12-26
  • [6] Kokh A.E.(2005)Numerical simulation of convective processes in the Bridgman growth of polycrystalline silicon in axially asymmetric thermal field Proc. 6th Int. Conf. “Growth of Single-Crystals and Heat and Mass Transfer” 3 603-611
  • [7] Harlow F.H.(undefined)undefined undefined undefined undefined-undefined
  • [8] Welch J.E.(undefined)undefined undefined undefined undefined-undefined
  • [9] Patankar S.V.(undefined)undefined undefined undefined undefined-undefined
  • [10] Spalding D.B.(undefined)undefined undefined undefined undefined-undefined