Analysis of α-alumina samples by mass spectrometry with inductively coupled plasma and laser ablation

被引:0
作者
V. A. Khvostikov
V. K. Karandashev
Zh. P. Burmii
机构
[1] Russian Academy of Sciences,Institute of Microelectronics Technology and High
来源
Inorganic Materials | 2015年 / 51卷
关键词
laser ablation; inductively coupled plasma; mass spectrometry; α-alumina;
D O I
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学科分类号
摘要
A procedure for analysis of a-alumina (sapphire, corundum, etc.) samples by mass spectrometry with inductively coupled plasma and laser ablation (LA-ICP-MS) is described. This procedure allows one to determine up to 60 impurity elements with detection limits of 10–7–10–4 wt %. The validity of the results of LA-ICP-MS determination is verified by comparing them to the results obtained using an independent technique that is based on dissolving the samples in a mixture of H2SO4 and H3PO4 with subsequent determination of impurity elements by atomic emission spectrometry and mass spectrometry with inductively coupled plasma.
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页码:1410 / 1415
页数:5
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