共 34 条
[1]
Alphonsus ER(2016)A review on the applications of programmable logic controllers Renew Sustain Energy Rev 60 1185-1205
[2]
Abdullah MO(2007)Friction models for sliding dry, boundary and mixed lubricated contacts Tribol Int 40 581-587
[3]
Andersson S(2004)Modeling and high-precision control of a ball-screw-driven stage Precis Eng 28 483-495
[4]
Anders S(2005)Design and control of a dual-stage feed drive Int J Mach Tools Manuf 40 153-156
[5]
Stefan B(1991)On the modeling and simulation of friction Int J Machine Tools Manuf 113 354-360
[6]
Chen CL(1997)An ultraprecision stage for alignment of wafers in advance microlithography Proc Precis Eng 21 335-345
[7]
Jang MJ(1984)Precision X-Y Stage with a piezo- driven fine table Bull Jpn Soc Precis Eng 50 718-723
[8]
Lin KC(2007)Efficient simulation of a dynamic system with LuGre friction J Comput Nonlinear Dyn 2 281-289
[9]
Elfizy T(2001)Ultra precision positioning system for servo motor piezo actuator using dual servo loop and digital filter implementation Int J Mach Tools Manuf 41 51-63
[10]
Bone GM(2000)Robust friction compensation for sub micrometer positioning and tracking for a ball-screw-driven slide system Precis Eng 24 160-173