Tape casting of AlN/glass composites for LTCC substrate

被引：7
作者：
Qingxue Zhang
Xiaojun Luo
Wenlan Li
Hanrui Zhuang
Dongsheng Yan
机构：
[1] Shanghai Institute of Ceramics,Chinese Academy of Sciences
来源：
Journal of Materials Science | 2003年 / 38卷
关键词：
Polymer; Viscosity; Microstructure; Lamination; Rheological Property;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
AlN/glass composite is low-fired substrate material for microelectronic packaging material. In this work, AlN/glass sheets were prepared by tape casting process. The dispersion, stabilization and the rheological properties of the slurry were studied. The optimum drying condition and mechanisms of debinding were also investigated. The results showed that powder size influenced the optimum content of dispersant and the viscosity of slurry. The slurry for tape casting exhibited a typical shear-thinning behavior. Smooth green tape without cracking was acquired after it was dried at solvent atmosphere. The binder was fully burned out at 600°C at low heating speed. The lamination with uniform microstructure was achieved by hot-pressed at 900°C.
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页码：1781 / 1785
页数：4
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