The ion emissivity of a hollow-cathode non-self-sustained glow discharge

被引：1

作者：

Vizir A.V. ^{[1
]}

Oks E.M. ^{[1
]}

Yushkov G.Yu. ^{[1
]}

机构：

来源：

Russian Physics Journal | 2000年 / 43卷 / 2期

关键词：

Discharge Current; Glow Discharge; Electron Injection; Double Ionization; Beam Constitution;

D O I：

10.1007/BF02508594

中图分类号：

学科分类号：

摘要：

The paper presents the results of research of the mass-charge state of an ion beam extracted from the plasma of a hollow-cathode non-self-sustained glow discharge with a time-of-flight spectrometer. The influence of the discharge parameters on the mass-charge state of the beam is discussed. It has been shown that a drop in discharge operating voltage allows a substantial decrease in the metal-ion fraction of the beam, and an increase in discharge current results in an increase in the average charge of gas ions and in an increase in the metal fraction of the beam. © 2000 Kluwer Academic/Plenum Publishers.

引用

页码：90 / 95

页数：5

共 12 条

[1]

Moskalev B.I., Hollow-cathode Discharge [in Russian], (1969)

[2]

Plasma-emitter Electron-sources [in Russian], (1983)

[3]

Forrester A.T., Large Ion Beams, (1988)

[4]

Metel A.S., Zh. Tekh. Fiz., 2, pp. 241-247, (1984)

[5]

Denisov S.S., Uspenskii N.A., Fedyakov V.P., Prib. Tekh. Eksp., 54, pp. 139-142, (1984)

[6]

Gavrilov N.V., Kreindel Yu.E., Shchyanin P.M., Prib. Tekh. Eksp., 2, pp. 142-146, (1984)

[7]

Vizir A.V., Oks E.M., Shchyanin P.M., Yushkov G.Yu., Zh. Tekh. Fiz., 69, pp. 27-31, (1997)

[8]

Brown I.G., Galvin J.I., MacGill R.A., Wright R.T., Rev. Sci. Instrum., 58, 9, pp. 1589-1592, (1997)

[9]

Oks E.M., Anders A., Brown I.G., Et al., IEEE Trans. Plasma Sci., 24, pp. 1174-1183, (1996)

[10]

Gavrilov N.V., Mesyats G.A., Radkovski G.V., Bersenev V.V., Surf. Coat. Technol., 96, pp. 81-88, (1997)

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