Si nanopatterning by reactive ion etching through an on-chip self-assembled porous anodic alumina mask

被引：0
作者：
Violetta Gianneta
Antonis Olziersky
Androula G Nassiopoulou
机构：
[1] Terma Patriarhou Gregoriou,NCSR Demokritos/IMEL
来源：
Nanoscale Research Letters | / 8卷
关键词：
Porous anodic alumina; Si nanopatterning; Reactive ion etching; Fluorine chemistry;
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