Si nanopatterning by reactive ion etching through an on-chip self-assembled porous anodic alumina mask

被引：0

作者：

Violetta Gianneta

Antonis Olziersky

Androula G Nassiopoulou

机构：

[1] Terma Patriarhou Gregoriou,NCSR Demokritos/IMEL

来源：

Nanoscale Research Letters | / 8卷

关键词：

Porous anodic alumina; Si nanopatterning; Reactive ion etching; Fluorine chemistry;

D O I：

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摘要：

引用

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