Micromachining of highly reproducible step substrates for high Tc step junction dc-SQUIDs

被引：0
|
作者：
J. Wang
B. Han
G. Chen
Q. Yang
T. Cui
机构：
[1] Chinese Academy of Sciences,Institute of Physics and Center for Condensed Matter Physics
[2] Louisiana Tech University,Institute for Micromanufacturing
来源：
Microsystem Technologies | 2003年 / 9卷
关键词：
Step Edge; Incline Angle; Milling Condition; Substrate Yield; High Step;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A means to successfully fabricate highly reproducible SrTiO3 step substrates for high TC dc-Superconducting Quantum Interference Devices (dc-SQUIDs) by micromachining is reported in this paper. At optimized Ar ion milling conditions, an inclined angle from 45 to 50° and a laid angle from 30 to 45°, the highest step angles can be obtained. Under strict process control, the profile of the Nb mask film is clean and sharp. The fabricated step angles are about 71° with steep and flawless topography. The step substrate yield for YBa2Cu3O7−x Josephson step edge junction dc-SQUIDs is 75%. The variation of junction resistance and critical current is ±28.6% and ±42.4% respectively.
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页码：480 / 483
页数：3
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