Development of NbTiN-Al Direct Antenna Coupled Kinetic Inductance Detectors

被引：0
|
作者：
Y. J. Y. Lankwarden
A. Endo
J. J. A. Baselmans
M. P. Bruijn
机构：
[1] SRON Netherlands Institute for Space Research,Sensor Research and Technology Division
[2] Delft University of Technology,Kavli Institute of NanoScience, Faculty of Applied Sciences
来源：
Journal of Low Temperature Physics | 2012年 / 167卷
关键词：
Low temperature detectors; Kinetic inductance detectors; Process development; Air bridges;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
We have developed a coplanar waveguide (CPW) Kinetic Inductance Detector consisting of Al and NbTiN, coupled at its shorted end to a planar antenna. To suppress the odd mode due to direct coupling to sky radiation by the KID we have also developed freestanding metal air bridges.
引用
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页码：367 / 372
页数：5
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