Exploring microdischarges for portable sensing applications

被引：0
作者：
Y. B. Gianchandani
S. A. Wright
C. K. Eun
C. G. Wilson
B. Mitra
机构：
[1] University of Michigan,Center for Wireless Integrated Microsystems
[2] Louisiana Tech University,Institute for Micromanufacturing
[3] Rutgers University,Department of Electrical Engineering and Computer Engineering
来源：
Analytical and Bioanalytical Chemistry | 2009年 / 395卷
关键词：
Plasma; Discharge; Chemical; Radiation; Pressure;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
This paper describes the use of microdischarges as transducing elements in sensors and detectors. Chemical and physical sensing of gases, chemical sensing of liquids, and radiation detection are described. These applications are explored from the perspective of their use in portable microsystems, with emphasis on compactness, power consumption, the ability to operate at or near atmospheric pressure (to reduce pumping challenges), and the ability to operate in an air ambient (to reduce the need for reservoirs of carrier gases). Manufacturing methods and performance results are described for selected examples.
引用
收藏
页码：559 / 575
页数：16
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