Implementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications

被引：0
作者：
Kim D.-H. [1 ]
Kim B. [1 ]
Park J.-O. [1 ]
机构：
[1] Microsystem Research Center, Korea Inst. of Sci. and Technology, Cheongryang, Seoul 130-650
来源：
KSME International Journal | 2004年 / 18卷 / 5期
关键词：
Atomic Force Microscope (AFM); Micro Force Sensing; Micro/Nano-manipulation; Microrobotics; Piezoresistive MEMS Cantilever; Van der Waals Force;
D O I：
10.1007/BF02990297
中图分类号：
学科分类号：
摘要：
The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/ nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in microrobotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a microrobotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.
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页码：789 / 797
页数：8
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