Fabrication of microlens array with graduated sags using UV proximity printing method

被引：0
|
作者：
H. Yang
C.-K. Chao
T.-H. Lin
C.-P. Lin
机构：
[1] National Chung Hsing University,Institute of Precision Engineering
[2] National Taiwan University of Science and Technology,Department of Mechanical Engineering
[3] Nan Kai Institute of Technology,Department of Mechanical Engineering
来源：
Microsystem Technologies | 2005年 / 12卷
关键词：
Microlens array; UV proximity printing; Gradual sag height; Micro-optics;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A graduated microlens array is presented in this paper. The proposed device has the same aperture microlens with a gradually increasing sag in the substrate. The design produces gradual decrease in the focal length and intensity when the light passes through the graduated microlens array. This paper presents a new graduated microlens array fabrication method that uses a variable printing gap in the UV lithography process. This method can precisely control the geometric profile of each microlens array without using the thermal reflow process. The angles between the mask and photoresist were placed at 5°, 8°, 10°, 15°, and 20° using a fixture designed in this study. The mask patterns were ellipses with an isosceles triangle arrangement to compensate for the partial geometry.
引用
收藏
页码：82 / 90
页数：8
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