Jet properties and mixing chamber flow in a high-pressure abrasive slurry jet: part I—measurement of jet and chamber conditions

Techniques to enhance the performance of a high-pressure abrasive slurry jet micro-machining process (HASJM) were investigated by altering the conditions within the jet. The slurry flow rate was controlled using six inlet tubes (cross-sectional areas of 0.2, 0.46, 1.27, 1.77, 3.08, and 4.51 mm2), and was found to have a large effect on the conditions within the mixing chamber. The tubes permitted the use of high-concentration slurry solutions, which resulted in increased machining rates and the ability to machine glass targets without cracking by using a minimum particle concentration of 17 wt%. Slurry tubes producing large slurry flow rates caused the mixing chamber to flood, resulting in a much lower jet velocity. The size of the smallest slurry tube size that caused the mixing chamber to flood was dependent on the pump operating pressure, and varying from 1.27 mm2 at 134 MPa, to 1.5 mm2 at 233 MPa. Mixing chamber flooding significantly reduced the erosion rate of the jet and increased the machining time, as discussed in the second part of this two-part paper. Mixing chamber pressures were found to be low enough to cause boiling, which increased the jet diameter and the width of features that could be machined without a mask.